Hybrid silicon laser-quantum well intermixing wafer bonded integration platform for advanced photonic circuits with electroabsorption modulators

Patent metadata

Field	Value
Publication number	US-9020002-B2
Application number	US-201314026528-A
Country	US
Kind code	B2
Filing date	Sep 13, 2013
Priority date	Jan 18, 2008
Publication date	Apr 28, 2015
Grant date	Apr 28, 2015

Abstract

Photonic integrated circuits on silicon are disclosed. By bonding a wafer of compound semiconductor material as an active region to silicon and removing the substrate, the lasers, amplifiers, modulators, and other devices can be processed using standard photolithographic techniques on the silicon substrate. A silicon laser intermixed integrated device in accordance with one or more embodiments of the present invention comprises a silicon-on-insulator substrate, comprising at least one waveguide in a top surface, and a compound semiconductor substrate comprising a gain layer, the compound semiconductor substrate being subjected to a quantum well intermixing process, wherein the upper surface of the compound semiconductor substrate is bonded to the top surface of the silicon-on-insulator substrate.

First claim

What is claimed is:

1. A photonic device comprising:
a silicon-on-insulator substrate comprising a silicon layer that includes a first waveguide; and
a compound semiconductor structure comprising:
a first layer comprising a p-type compound semiconductor;
a second layer comprising an n-type compound semiconductor; and
a multiple-quantum-well (MQW) layer that is between the first layer and the second layer, the MQW layer being characterized by an as-grown bandgap, the MQW layer including a first region having a first bandgap that is shifted by a first shift from the as-grown bandgap, the first shift being based on an ion-implanted layer proximate to the second layer and distal to the first layer;

wherein the compound semiconductor structure and the first waveguide are bonded such that the MQW layer and the first waveguide are optically coupled and the second layer is proximate to the first waveguide;
and wherein the compound semiconductor structure includes a gain region, a first mirror region, and a second mirror region, the gain region being between the first mirror region and the second mirror region, the first region including one of the gain region, the first mirror region and the second mirror region.

2. The photonic device of claim 1 , wherein the compound semiconductor structure includes a modulator region that is optically coupled with the gain region.

3. The photonic device of claim 2 , wherein the modulator region comprises an electroabsorption modulator.

4. The photonic device of claim 2 , wherein the modulator region includes a second region of the MQW layer, the second region having a second bandgap that is shifted by a second shift from the as-grown bandgap.

5. The photonic device of claim 2 , wherein the compound semiconductor structure includes a semiconductor optical amplifier (SOA), the SOA being optically coupled with each of the gain region and the modulator region.

6. The photonic device of claim 1 , wherein the compound semiconductor structure includes a semiconductor optical amplifier (SOA), the SOA being optically coupled with the gain region.

7. The photonic device of claim 1 wherein the compound semiconductor structure further comprises a separate confined heterostructure (SCH) layer, the MQW layer being between the second layer and the SCH layer.

8. The photonic device of claim 1 wherein the compound semiconductor structure further comprises superlattice layer that is located between the silicon layer and the MQW layer.

9. The photonic device of claim 1 wherein the compound semiconductor structure further comprises:
a first proton implanted region located between the gain region and the first mirror region; and
a second proton implanted region located between the gain region and the second mirror region.

10. The photonic device of claim 1 wherein the compound semiconductor structure further comprises a phase control region, the phase control region being located between the gain region and the first mirror region.

11. The photonic device of claim 1 wherein the compound semiconductor structure further comprises:
a third region wherein the MQW layer is characterized by the second bandgap, wherein each of the second region and third region is operative for reflecting at least a portion of the optical signal, and wherein the first region is between the second region and third region; and
a fourth region wherein the MQW layer is characterized by a third bandgap, the third bandgap being shifted from the as-grown bandgap by a second shift that is based on a second period of quantum-well intermixing performed through the second layer, the third region being operative for modulating the intensity of the optical signal;
wherein the first region, second region, third region, and fourth region are optically coupled.

12. A photonic device comprising:
a silicon layer that includes a first waveguide; and
a compound semiconductor structure comprising:
a first layer comprising a p-type compound semiconductor;
a second layer comprising an n-type compound semiconductor; and
a multiple-quantum-well (MQW) layer that is between the first layer and the second layer, the MQW layer being characterized by an as-grown bandgap;

wherein the compound semiconductor structure and the first waveguide are bonded such that the MQW layer and the first waveguide are optically coupled and the second layer is proximate to the first waveguide;
and wherein the compound semiconductor structure further includes:
a first region wherein the MQW layer is characterized by a first bandgap that is equal to the as-grown bandgap, the first region being operative for providing optical gain; and
a second region wherein the MQW layer is characterized by a second bandgap, the second bandgap being shifted from the as-grown bandgap by a first shift that is based on a first period of quantum-well intermixing performed through the second layer.

13. The photonic device of claim 12 , wherein the compound semiconductor structure includes a semiconductor optical amplifier (SOA), the SOA being optically coupled with at least one of the first region and second region.

14. The photonic device of claim 12 , further comprising a grating structure that is optically coupled with the first waveguide.

15. The photonic device of claim 12 , wherein the compound semiconductor structure further comprises third layer that is between the MQW layer and the second layer, the third layer comprising a compound semiconductor superlattice, and the third layer being operable for inhibiting migration of defects between the MQW layer and second layer after the compound semiconductor structure and the first waveguide are bonded.

16. The photonic device of claim 12 , wherein the compound semiconductor structure includes a semiconductor optical amplifier (SOA), the SOA being optically coupled with the gain region.

17. The photonic device of claim 12 wherein the compound semiconductor structure further comprises a separate confined heterostructure (SCH) layer, the MQW layer being between the second layer and the SCH layer.

18. A method comprising:
(1) providing a first substrate having a compound semiconductor structure that includes:
(a) a first layer comprising an p-type compound semiconductor;
(b) a second layer comprising a n-type compound semiconductor;
(c) an MQW layer that is between the first layer and second layer;
wherein the first layer is proximate to a base substrate, and wherein the second layer is distal to the base substrate, and further wherein the MQW layer is characterized by an as-grown bandgap; and
(d) a sacrificial layer that is proximate to the second layer;

implanting the sacrificial layer with a first dopant to induce defects in the sacrificial layer;
removing the sacrificial layer in a first region;
heating the compound semiconductor structure for a first time to diffuse the defects through the second layer and into the MQW layer in a second region, wherein the bandgap of the second region is based on the first time;
removing the sacrificial layer;
bonding the first substrate to a second substrate having a silicon layer that includes a first waveguide, wherein the first substrate is bonded to the second substrate such that the second layer is proximate to the first waveguide and the MQW layer and first waveguide are optically coupled;
removing the first substrate;
forming a hybrid-silicon laser in the first region; and
forming first and second mirror regions in the second region, the first region being between the first and second mirror region

Assignees

• Univ California

Inventors

• Sysak Matthew N
• Bowers John E
• Fang Alexander W
• Park Hyundai

Classifications

• H01S5/026

  Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers (stabilisation of output H01S5/06) · CPC title

• H01S5/1032

  Coupling to elements comprising an optical axis that is not aligned with the optical axis of the active region · CPC title

• H01S5/0217

  Removal of the substrate · CPC title

• H01S5/0265 Primary

  Intensity modulators (intra-cavity modulators H01S5/0625) · CPC title

• H01S5/021

  Silicon based substrates · CPC title