Projection system and projector
US-2024176221-A1 · May 30, 2024 · US
Catadioptric projection objective with intermediate images
US9019596B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9019596-B2 |
| Application number | US-201213361707-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 30, 2012 |
| Priority date | May 17, 2004 |
| Publication date | Apr 28, 2015 |
| Grant date | Apr 28, 2015 |
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Abstract
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A catadioptric projection objective has a first objective part, defining a first part of the optical axis and imaging an object field to form a first real intermediate image. It also has a second, catadioptric objective part forming a second real intermediate image using the radiation from the first objective part. The second objective part has a concave mirror and defines a second part of the optical axis. A third objective part images the second real intermediate image into the image plane and defines a third part of the optical axis. Folding mirrors deflect the radiation from the object plane towards the concave mirror; and deflect the radiation from the concave mirror towards the image plane. The first part of the optical axis defined by the first objective part is laterally offset from and aligned parallel with the third part of the optical axis.
First claim
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What is claimed is: 1. A catadioptric projection objective for imaging a pattern, which is arranged on an object plane of the projection objective, on an image plane of the projection objective, comprising: a first objective part imaging an object field to form a first real intermediate image using radiation and defining a first part of an optical axis, a second objective part forming a second real intermediate image using the radiation from the first objective part, the second…
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Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
- G02B17/0804Primary
Physics · mapped topic
- G03F7/70058Primary
Physics · mapped topic
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Frequently asked questions
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- What does patent US9019596B2 cover?
- A catadioptric projection objective has a first objective part, defining a first part of the optical axis and imaging an object field to form a first real intermediate image. It also has a second, catadioptric objective part forming a second real intermediate image using the radiation from the first objective part. The second objective part has a concave mirror and defines a second part of the …
- Who is the assignee on this patent?
- Dodoc Aurelian, Ulrich Wilhelm, Epple Alexander, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification G02B17/0804. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Apr 28 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).