Surface-defect inspection device

Patent metadata

Field	Value
Publication number	US-9019490-B2
Application number	US-201313956858-A
Country	US
Kind code	B2
Filing date	Aug 1, 2013
Priority date	Sep 30, 2009
Publication date	Apr 28, 2015
Grant date	Apr 28, 2015

Abstract

A data processing and controlling portion calculates the amounts of coordinate deviations between artificial defects on a standard sample and detected defects on an inspected sample, checks the sensitivity (instrumental sensitivity (luminance, brightness, or the like)), and proceeds to execution of hardware corrections. If the coordinate deviation is less than a certain value, software corrections are carried out. In the case of the software corrections, coordinate corrections are made for the whole standard sample. The amounts of coordinate deviations are computed and checked. If the amounts of coordinate deviations are outside a tolerance, coordinate corrections are made for each region obtained by dividing the standard sample.

First claim

What we claim is:

1. An inspection apparatus comprising:
an optical system configured to illuminate light to a standard sample having plural artificial defects disposed at known positions;
a detector configured to detect scattered light from the standard sample;
a determination unit configured to detect the artificial defects based on a signal from the detector; and
a data processing unit configured to compare a coordinate position of the artificial defects outputted from th…

Assignees

• Hitachi High Tech Corp

Inventors

• Suzuki Katsuya
• Jingu Takahiro

Classifications

• H04L9/3247

  Electricity · mapped topic

• H04N5/77

  Electricity · mapped topic

• G01N21/93 Primary

  Physics · mapped topic

• G01N2021/8861

  Physics · mapped topic

• G01N21/9501 Primary

  Physics · mapped topic