MEMS-based voltmeter

Patent metadata

Field	Value
Publication number	US-9018937-B2
Application number	US-201213352219-A
Country	US
Kind code	B2
Filing date	Jan 17, 2012
Priority date	Jan 17, 2012
Publication date	Apr 28, 2015
Grant date	Apr 28, 2015

Abstract

An electromechanical system (MEMS) voltmeter. An exemplary MEMS voltmeter includes a proof mass mounted to a substrate in a teeter-totter manner. The MEMS voltmeter also includes an input voltage plate located on the substrate under a first end of the proof mass. The first input voltage plate receives a voltage from a device under test. A drive voltage plate is located on the substrate under a second end of the proof mass. A first sense input voltage plate is located on the substrate under the first end of the proof mass. A second sense voltage plate is located on the substrate under the second end of the proof mass. A rebalancing circuit receives signals from the proof mass and the first and second sense voltage plates and generates a voltage value that is equal to the root mean square (RMS) voltage of the device under test.

First claim

The embodiments of the invention in which an exclusive property or privilege is claimed are defined as follows:

1. A voltmeter comprising:
a proof mass electrically coupled to an effective ground;
an input voltage plate located on a substrate adjacent a first end of the proof mass, wherein the input voltage plate is configured to receive a voltage from a device under test;
a drive voltage plate located on the substrate adjacent a second end of the proof mass;
a sensing devic…

Assignees

• Werking Paul M
• Honeywell Int Inc

Inventors

• Werking Paul M

Classifications

• G01R19/02

  Physics · mapped topic

• G01R5/00 Primary

  Physics · mapped topic

• G01R15/146

  Physics · mapped topic