Non-planar semiconductor device having active region with multi-dielectric gate stack

US9018680B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9018680-B2
Application numberUS-201414340981-A
CountryUS
Kind codeB2
Filing dateJul 25, 2014
Priority dateSep 27, 2012
Publication dateApr 28, 2015
Grant dateApr 28, 2015

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Abstract

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Non-planar semiconductor devices having group III-V material active regions with multi-dielectric gate stacks are described. For example, a semiconductor device includes a hetero-structure disposed above a substrate. The hetero-structure includes a three-dimensional group III-V material body with a channel region. A source and drain material region is disposed above the three-dimensional group III-V material body. A trench is disposed in the source and drain material region separating a source region from a drain region, and exposing at least a portion of the channel region. A gate stack is disposed in the trench and on the exposed portion of the channel region. The gate stack includes first and second dielectric layers and a gate electrode.

First claim

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What is claimed is: 1. A semiconductor device, comprising: a semiconductor substrate comprising a first semiconductor material; a second layer above the semiconductor substrate, the second layer comprising a second material different from the first semiconductor material; a nanowire above the second layer, the nanowire comprising a third material different than the second material, the nanowire having a channel region; a source region to a first side of the channel region an…

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What does patent US9018680B2 cover?
Non-planar semiconductor devices having group III-V material active regions with multi-dielectric gate stacks are described. For example, a semiconductor device includes a hetero-structure disposed above a substrate. The hetero-structure includes a three-dimensional group III-V material body with a channel region. A source and drain material region is disposed above the three-dimensional group …
Who is the assignee on this patent?
Dewey Gilbert, Radosavljevic Marko, Pillarisetty Ravi, and 3 more
What technology area does this patent fall under?
Primary CPC classification H10D30/60. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Apr 28 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).