Combinatorial heating of substrates by an inductive process and combinatorial independent heating

US9018570B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9018570-B2
Application numberUS-201113327482-A
CountryUS
Kind codeB2
Filing dateDec 15, 2011
Priority dateDec 15, 2011
Publication dateApr 28, 2015
Grant dateApr 28, 2015

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Abstract

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Induction heating systems and methods for combinatorial heating of a substrate are disclosed. The induction heating system includes a susceptor segmented into multiple regions (e.g., two to 20 regions) that are separated from one another by a reflective channel that is purged with a liquid (e.g., gas or liquid). The induction heating system includes multiple induction coils, each induction coil corresponding to one of the susceptor regions or segments. The distance between each induction coil and the susceptor region can be varied using an independent lift for each region. The relative distance between the coils and the corresponding susceptor regions is used to vary the temperature of a substrate so that different regions of the substrate can be independently heated to different temperatures.

First claim

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What is claimed is: 1. An induction heating system for combinatorial heating of a substrate, the induction heating system comprising: a processing chamber comprising a susceptor having multiple segments, each segment of the multiple segments comprising a susceptor region, an inductor coil positioned under the susceptor region and connected to an independent power source, and a lift coupled to the inductor coil and operable to vary a distance between the inductor coil and the…

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What does patent US9018570B2 cover?
Induction heating systems and methods for combinatorial heating of a substrate are disclosed. The induction heating system includes a susceptor segmented into multiple regions (e.g., two to 20 regions) that are separated from one another by a reflective channel that is purged with a liquid (e.g., gas or liquid). The induction heating system includes multiple induction coils, each induction coil…
Who is the assignee on this patent?
Child Kent Riley, Intermolecular Inc
What technology area does this patent fall under?
Primary CPC classification H05B6/06. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Apr 28 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).