Method and apparatus for making a nanopore in a membrane using an electric field applied via a conductive tip
US-11224842-B2 · Jan 18, 2022 · US
US9018565B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9018565-B2 |
| Application number | US-201113807402-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 4, 2011 |
| Priority date | Jul 2, 2010 |
| Publication date | Apr 28, 2015 |
| Grant date | Apr 28, 2015 |
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An apparatus for producing holes in dielectric workpieces in the form of thin sheets and substrates, in particular of glass or glass-like materials and semiconductors is provided. The apparatus includes individual high-voltage electrodes that are symmetrically arranged on an electrode holder around the hole to be produced in the workpiece. The apparatus also includes individual counter electrodes that are arranged on a counter electrode holder. The electrodes and counter electrodes can be connected in a permutating manner to a high-voltage source for the discharge of high-voltage flashovers.
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The invention claimed is: 1. An apparatus for producing holes in a thin sheet dielectric workpiece, comprising: an electrode holder and a counter electrode holder defining a processing space sufficient to receive the workpiece; a plurality of electrodes and a plurality of counter electrodes arranged opposed to each other on either side of the workpiece and supported by the electrode and counter electrode holders, each of the plurality of electrodes having a plurality of individu…
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