Semiconductor device with high breakdown voltage and manufacture thereof
US-9520326-B2 · Dec 13, 2016 · US
US9018069B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9018069-B2 |
| Application number | US-201314021120-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 9, 2013 |
| Priority date | Jul 19, 2011 |
| Publication date | Apr 28, 2015 |
| Grant date | Apr 28, 2015 |
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A semiconductor structure and a method for manufacturing the same are provided. The semiconductor structure comprises a diode. The diode comprises a first doped region, a second doped region and a third doped region. The first doped region and the third doped region have a first conductivity type. The second doped region has a second conductivity type opposite to the first conductivity type. The second doped region and the third doped region are separated from each other by the first doped region. The third doped region has a first portion and a second portion adjacent to each other. The first portion and the second portion are respectively adjacent to and away from the second doped region. A dopant concentration of the first portion is bigger than a dopant concentration of the second portion.
Opening claim text (preview).
What is claimed is: 1. A method for manufacturing a semiconductor structure, comprising forming a diode, a method for forming the diode comprising: forming a second doped region on a first doped region comprising a well region and a top layer having a dopant concentration bigger than that of the well region; and forming a third doped region on the first doped region, wherein the first doped region and the third doped region have a first conductivity type, the second doped regi…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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