Liquid ejection head, method of manufacturing liquid ejection head and image forming apparatus

Patent metadata

Field	Value
Publication number	US-9016834-B2
Application number	US-72134710-A
Country	US
Kind code	B2
Filing date	Mar 10, 2010
Priority date	Mar 12, 2009
Publication date	Apr 28, 2015
Grant date	Apr 28, 2015

Abstract

A liquid ejection head includes: a flow channel unit having a plurality of pressure chambers arranged in a plane; and piezoelectric actuators which change volume of the plurality of pressure chambers so as to apply pressure to liquid inside the plurality of the pressure chambers respectively, wherein the piezoelectric actuators comprise: a diaphragm which constitutes one wall of the plurality of pressure chambers; a common electrode formed on a surface of the diaphragm; a piezoelectric layer formed on a surface of the common electrode; a plurality of ring-shaped individual electrodes formed on a surface of the piezoelectric layer and formed in regions which overlap respectively with marginal portions which are non-central portions of the plurality of pressure chambers, as viewed from a direction perpendicular to the plane; and central electrodes connected electrically to the common electrode, and formed so as not to make contact with the plurality of ring-shaped individual electrodes in inner regions of the plurality of ring-shaped individual electrodes, as viewed from the direction perpendicular to the plane.

First claim

What is claimed is:

1. A liquid ejection head, comprising:
a flow channel unit having a plurality of pressure chambers arranged in a plane; and
piezoelectric actuators which change volume of the plurality of pressure chambers so as to apply pressure to liquid inside the plurality of the pressure chambers respectively, wherein
the piezoelectric actuators comprise:
a diaphragm which constitutes one wall of the plurality of pressure chambers;
a common electrode formed on a surface of the diaphragm;
a piezoelectric layer formed on a surface of the common electrode;
a plurality of ring-shaped individual electrodes formed on a surface of the piezoelectric layer and formed in regions which overlap respectively with marginal portions which are non-central portions of the plurality of pressure chambers, as viewed from a direction perpendicular to the plane; and
central electrodes connected electrically to the common electrode, and formed so as not to make contact with the plurality of ring-shaped individual electrodes in inner regions of the plurality of ring-shaped individual electrodes, as viewed from the direction perpendicular to the plane, wherein:
the piezoelectric layer has holes having a smaller planar dimension than the central electrodes and being formed in regions on the surface of the piezoelectric layer which overlap with central portions of the plurality of pressure chambers; and
the central electrodes and the common electrode are connected electrically via a metal film formed inside the holes.

2. The liquid ejection head as defined in claim 1 , wherein the holes in the piezoelectric layer is formed in centers of inner circumferential portions of the plurality of ring-shaped individual electrodes.

3. The liquid ejection head as defined in claim 1 , wherein each of distances between the ring-shaped individual electrode and the central electrodes is equal to or greater than a thickness of the piezoelectric layer.

4. The liquid ejection head as defined in claim 1 , wherein the plurality of ring-shaped individual electrodes have an inner circumferential shape that is substantially similar to a planar shape of the central electrodes.

5. The liquid ejection head as defined in claim 4 , wherein centers of inner circumferential portions of the plurality of ring-shaped individual electrodes and centers of the central electrodes coincide with each other when observed from the direction perpendicular to the plane.

6. The liquid ejection head as defined in claim 4 , wherein the inner circumferential shape of the plurality of ring-shaped individual electrodes is substantially similar to a planar shape of the plurality of pressure chambers.

7. The liquid ejection head as defined in claim 6 , wherein centers of the plurality of ring-shaped individual electrodes and centers of the plurality of pressure chambers coincide with each other when observed from the direction perpendicular to the plane.

8. The liquid ejection head as defined in claim 1 , wherein the plurality of ring-shaped individual electrodes extend up to regions which overlap with partitions of the plurality of pressure chambers.

9. The liquid ejection head as defined in claim 1 , wherein:
the plurality of ring-shaped individual electrodes each have an inner circumference portion in a shape of an oval, and
a cross-sectional shape of each of the central electrodes is a square shape.

10. The liquid ejection head as defined in claim 1 , wherein:
the plurality of ring-shaped individual electrodes each have an inner circumference portion in a shape of an oval, and
a cross-sectional shape of each of the central electrodes is an octagon shape.

11. The liquid ejection head as defined in claim 1 , wherein:
the plurality of ring-shaped individual electrodes each have an inner circumference portion in a shape of an oval, and
a cross-sectional shape of each of the central electrodes is an oval shape.

12. The liquid ejection head as defined in claim 1 , wherein:
the plurality of ring-shaped individual electrodes each have an inner circumference portion in a shape of a square, and
a cross-sectional shape of each of the central electrodes is an oval shape.

13. The liquid ejection head as defined in claim 1 , wherein:
the plurality of ring-shaped individual electrodes each have an inner circumference portion in a shape of a square, and
a cross-sectional shape of each of the central electrodes is an octagon shape.

14. The liquid ejection head as defined in claim 1 , wherein:
the plurality of ring-shaped individual electrodes each have an inner circumference portion in a shape of a square, and
a cross-sectional shape of each of the central electrodes is an square shape.

15. An image forming apparatus comprising the liquid ejection head as defined in claim 1 , wherein
the plurality of ring-shaped individual electrodes are arranged on the surface of the piezoelectric layer, on an opposite side to the diaphragm;
the common electrode is earthed; and
the piezoelectric layer is polarized in a direction from the diaphragm toward the individual electrodes,
the image forming apparatus further comprises a voltage application device which applies drive voltage waveform signals of negative potential to the individual electrodes so as to cause an electric field to act on the piezoelectric layer in a same direction as the direction of polarization of the piezoelectric layer, only when performing an ink ejection operation.

16. A liquid ejection head, comprising:
a flow channel unit having a plurality of pressure chambers arranged in a plane; and
piezoelectric actuators which change volume of the plurality of pressure chambers so as to apply pressure to liquid inside the plurality of the pressure chambers respectively, wherein
the piezoelectric actuators comprise:
a diaphragm which constitutes one wall of the plurality of pressure chambers;
a common electrode formed on a surface of the diaphragm;
a piezoelectric layer formed on a surface of the common electrode;
a plurality of ring-shaped individual electrodes formed on a surface of the piezoelectric layer and formed in regions which overlap respectively with marginal portions which are non-central portions of the plurality of pressure chambers, as viewed from a direction perpendicular to the plane; and
central electrodes connected electrically to the common electrode, and formed so as not to make contact with the plurality of ring-shaped individual electrodes in inner regions of the plurality of ring-shaped individual electrodes, as viewed from the direction perpendicular to the plane, wherein:
the piezoelectric layer has holes having a smaller planar dimension than the central electrodes and being formed in regions which overlap with central portions of the plurality of pressure chambers;
the piezoelectric layer has recess sections having a substantially equal planar dimension to the central electrodes and being formed in regions which overlap with central portions of the plurality of pressure chambers, on the surface of the piezoelectric layer, at positions which overlap with the holes;
the central electrodes are formed in the recess sections; and
the central electrodes and the common electrode are connected electrically via a metal film formed inside the holes.

17. The liquid ejection head as defined in claim 16 , wherein the holes in the piezoelectric layer is formed in centers of inner circumferential portions of the plurality of ring-shaped individual electrodes.

18. An image forming apparatus comprising the liquid ejection hea

Assignees

• Mita Tsuyoshi
• Fujifilm Corp

Inventors

• Mita Tsuyoshi

Classifications

• B41J2/1629

  wet etching · CPC title

• B41J2/1628

  dry etching · CPC title

• B41J2/14201 Primary

  Structure of print heads with piezoelectric elements · CPC title

• B41J2/1607

  Production of print heads with piezoelectric elements (B41J2/1606, B41J2/162 take precedence) · CPC title

• B41J2/1631

  photolithography · CPC title