Coupling transfer system

US9016501B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9016501-B2
Application numberUS-201113702518-A
CountryUS
Kind codeB2
Filing dateMay 30, 2011
Priority dateJun 8, 2010
Publication dateApr 28, 2015
Grant dateApr 28, 2015

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

In a transfer system for wafers, etc., a coupling chamber corresponding to a port is formed only when a transfer box comes in tight contact with an apparatus as a transfer target in the transfer box is transferred into the apparatus, so that the transfer target will be transferred together with the coupling chamber into the apparatus by means of magnetic attraction forces exerted between the transfer box, transfer box door and apparatus door, thereby simplifying the structures of the transfer box and apparatus and also allowing the transfer target to be transferred into the apparatus without fail.

First claim

Opening claim text (preview).

What is claimed is: 1. A coupling system comprising: a transfer box; and an apparatus having an apparatus body and an apparatus door with magnets; said coupling system having structures wherein: the transfer box has a first sealing structure hermetically sealable by means of tight coupling of a transfer box body and a transfer box door; the apparatus has a second sealing structure hermetically sealable by means of tight coupling of the apparatus body and apparatus door;…

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What does patent US9016501B2 cover?
In a transfer system for wafers, etc., a coupling chamber corresponding to a port is formed only when a transfer box comes in tight contact with an apparatus as a transfer target in the transfer box is transferred into the apparatus, so that the transfer target will be transferred together with the coupling chamber into the apparatus by means of magnetic attraction forces exerted between the tr…
Who is the assignee on this patent?
Hara Shiro, Maekawa Hitoshi, Nat Inst Of Advanced Ind Scien
What technology area does this patent fall under?
Primary CPC classification H10P72/3218. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Apr 28 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).