Vibration Measurement Device
US-2024410745-A1 · Dec 12, 2024 · US
US9016501B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9016501-B2 |
| Application number | US-201113702518-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 30, 2011 |
| Priority date | Jun 8, 2010 |
| Publication date | Apr 28, 2015 |
| Grant date | Apr 28, 2015 |
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Official abstract text for this publication.
In a transfer system for wafers, etc., a coupling chamber corresponding to a port is formed only when a transfer box comes in tight contact with an apparatus as a transfer target in the transfer box is transferred into the apparatus, so that the transfer target will be transferred together with the coupling chamber into the apparatus by means of magnetic attraction forces exerted between the transfer box, transfer box door and apparatus door, thereby simplifying the structures of the transfer box and apparatus and also allowing the transfer target to be transferred into the apparatus without fail.
Opening claim text (preview).
What is claimed is: 1. A coupling system comprising: a transfer box; and an apparatus having an apparatus body and an apparatus door with magnets; said coupling system having structures wherein: the transfer box has a first sealing structure hermetically sealable by means of tight coupling of a transfer box body and a transfer box door; the apparatus has a second sealing structure hermetically sealable by means of tight coupling of the apparatus body and apparatus door;…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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