Holding device, method of determining attraction abnormality in holding device, lithography apparatus, and method of manufacturing article
US-2024393682-A1 · Nov 28, 2024 · US
US9016301B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9016301-B2 |
| Application number | US-201213426780-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 22, 2012 |
| Priority date | Mar 30, 2011 |
| Publication date | Apr 28, 2015 |
| Grant date | Apr 28, 2015 |
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Official abstract text for this publication.
A conduit protection system, comprising: a conduit for carrying a fluid; a sealed vessel surrounding the conduit along a protected zone of the conduit; and a valve moveable between a first position for obstructing fluid flow through the protected zone of the conduit and a second position for enabling fluid flow through the protected zone of the conduit, wherein the valve is biased to the first position, and wherein the valve is fluidically coupled to the sealed vessel such that a positive pressure within the sealed vessel is operable to move the valve to the second position against the bias. Also, a method for protecting a fluid carrying conduit.
Opening claim text (preview).
The invention claimed is: 1. A conduit protection system, comprising: a conduit for carrying a fluid; a sealed vessel surrounding the conduit along a protected zone of the conduit; and a valve moveable between a first position for obstructing fluid flow through the protected zone of the conduit and a second position for enabling fluid flow through the protected zone of the conduit, wherein the valve is biased to the first position, and wherein the valve is fluidically couple…
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