Method for fabricating synthetic antiferromagnetic (SAF) device

Patent metadata

Field	Value
Publication number	US-9015927-B2
Application number	US-201213566130-A
Country	US
Kind code	B2
Filing date	Aug 3, 2012
Priority date	Jul 31, 2012
Publication date	Apr 28, 2015
Grant date	Apr 28, 2015

Abstract

A method for fabricating a synthetic antiferromagnetic device, includes depositing a reference layer on a first tantalum layer and including depositing a first cobalt iron boron layer, depositing a second cobalt iron boron layer on the first cobalt iron boron layer, depositing a second Ta layer on the second cobalt iron boron layer, depositing a magnesium oxide spacer layer on the reference layer and depositing a cap layer on the magnesium oxide spacer layer.

First claim

What is claimed is:

1. A method for fabricating a synthetic antiferromagnetic (SAF) device, the method comprising:
depositing a reference layer on a first tantalum layer and including:
depositing a first cobalt iron boron (CoFeB) layer;
depositing a second CoFeB layer on the first CoFeB layer;
depositing a second Ta layer on the second CoFeB layer;

depositing a magnesium oxide (MgO) spacer layer on the reference layer; and
depositing a cap layer on the MgO spacer layer.

2. The method as claimed in claim 1 further comprising depositing a storage layer between the MgO spacer layer and the cap layer.

3. The method as claimed in claim 2 wherein depositing the storage layer comprises:
depositing a fourth CoFeB layer on the MgO spacer layer;
depositing a third Ta layer on the fourth CoFeB layer; and
depositing a fifth CoFeB layer on the third Ta layer.

4. The method as claimed in claim 3 wherein depositing the cap layer comprises:
depositing a fourth Ta layer on the fifth CoFeB layer; and
depositing a ruthenium (Ru) layer on the fourth Ta layer.

5. The method as claimed in claim 3 wherein the first, second, third, fourth and fifth CoFeB layers are Co 20 Fe 60 B 20 .

6. The method claimed in claim 2 wherein the MgO spacer layer is magnetically coupled to the storage layer, after the device is subject to anneal temperatures of about 375° C. to 400° C.

7. The method as claimed in claim 1 wherein the first Ta layer is deposited on a substrate.

8. A method for fabricating a synthetic antiferromagnetic (SAF) device, the method comprising:
depositing a reference layer by depositing a first tantalum (Ta) layer, depositing a first CoFeB layer on the first Ta layer, depositing a second CoFeB layer on the first CoFeB layer, depositing a second Ta layer on the second CoFeB layer, and depositing a third CoFeB layer on the second Ta layer;
depositing a spacer layer on the reference layer;
depositing a storage layer on the spacer layer; and
depositing a cap layer on the storage layer,
wherein at least one of the reference layer and the storage layer include a refractory metal layer disposed between two layers of cobalt iron boron (CoFeB).

9. The method as claimed in claim 8 wherein depositing the cap layer comprises depositing a ruthenium (Ru) layer on a tantalum layer.

10. The method as claimed in claim 9 further comprising:
a substrate; and
depositing a seed layer on a substrate,
wherein the reference layer is disposed on the seed layer.

11. The method as claimed in claim 8 wherein when the refractory metal layer disposed between the two layers of CoFeB is disposed in the storage layer, depositing the storage layer further comprises:
depositing a fourth CoFeB layer on the spacer layer;
depositing a third Ta layer on the fourth CoFeB layer; and
depositing a fifth CoFeB layer on the third Ta layer.

12. The method as claimed in claim 8 further comprising depositing a hard mask tantalum nitride (TaN) layer on the cap layer.

13. The method as claimed in claim 8 wherein the refractory metal layer is a tantalum (Ta) layer.

14. The method claimed in claim 8 wherein the spacer layer is magnetically coupled to the storage layer, after the device is subject to anneal temperatures of about 375° C. to 400° C.

15. The method as claimed in claim 14 wherein two layers CoFeB are Co 20 Fe 60 B 20 .

16. A method for fabricating a synthetic antiferromagnetic (SAF) device, the method comprising:
depositing a first tantalum (Ta) layer on a substrate;
depositing a first cobalt iron boron (CoFeB) layer on the first Ta layer;
depositing a second CoFeB layer on the first CoFeB layer;
depositing a second Ta layer on the second CoFeB layer;
depositing a third CoFeB layer on the second Ta layer;
depositing a magnesium oxide (MgO) spacer layer the third CoFeB layer;
depositing a fourth CoFeB layer on the MgO spacer layer;
depositing a third Ta layer on the fourth CoFeB layer;
depositing a fifth CoFeB layer d on the third Ta layer;
depositing a cap layer on the fifth CoFeB layer;
depositing a hard mask tantalum nitride (TaN) layer on the cap layer;
coupling a bottom contact to the substrate; and
coupling a top contact to the hard mask TaN layer,
wherein the fourth CoFeB layer, the third Ta layer and the fifth CoFeB layer; form a storage layer.

17. The method claimed in claim 16 wherein the MgO spacer layer is magnetically coupled to the storage layer, after the device is subject to anneal temperatures of about 375° C. to 400° C.

18. The method as claimed in claim 16 wherein the first, second, third, fourth and fifth CoFeB layers are Co 20 Fe 60 B 20 .

Assignees

• Abraham David W
• Gaidis Michael C
• IBM

Inventors

• Abraham David W
• Gaidis Michael C

Classifications

• Y10T29/49044

  Plural magnetic deposition layers · CPC title

• Y10T29/49043

  Depositing magnetic layer or coating · CPC title

• Y10T29/49052

  by etching · CPC title

• Y10T29/49021

  Magnetic recording reproducing transducer [e.g., tape head, core, etc.] · CPC title

• G11C11/161 Primary

  details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell · CPC title