Hardmask composition, hardmask layer, and method of forming patterns
US-2024377746-A1 · Nov 14, 2024 · US
US9012127B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9012127-B2 |
| Application number | US-201113820608-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 29, 2011 |
| Priority date | Nov 29, 2010 |
| Publication date | Apr 21, 2015 |
| Grant date | Apr 21, 2015 |
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The invention includes a novel light-activated polymerizable composition, wherein reversible crosslinks may be converted into irreversible crosslinks using a fully controllable physical and/or chemical process. The invention further includes methods of photofixing a light sensitive material or patterning an article comprising a light sensitive material.
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What is claimed is: 1. A composition comprising at least one reversibly crosslinked polymer and at least one fixing molecule, wherein the at least one reversibly crosslinked polymer comprises at least one crosslink, wherein the at least one crosslink is formed by a reversible crosslinking reaction and comprises at least one chemical group that may react with the fixing molecule, wherein the reaction between the fixing molecule and the at least one chemical group of the at leas…
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