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Method and apparatus for treatment of self-assemblable polymer layers for use in lithography
US9011978B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9011978-B2 |
| Application number | US-201113580356-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 6, 2011 |
| Priority date | Feb 26, 2010 |
| Publication date | Apr 21, 2015 |
| Grant date | Apr 21, 2015 |
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Abstract
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Treatment of a layer comprising self-assemblable polymer at a surface of a substrate is disclosed. In an embodiment, the treatment includes arranging a zone of temperature change to sweep across the layer, wherein a temperature of the layer within the zone differs from an initial temperature of the layer prior to passage of the zone.
First claim
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The invention claimed is: 1. A method for treatment of a layer comprising self-assemblable polymer self-assembled at a surface of a substrate, the method comprising arranging for a zone of temperature change to sweep across the layer, wherein a temperature of the layer within the zone differs from an initial temperature of the layer prior to passage of the zone and a temperature within the zone exceeds an order-disorder transition temperature To/d of the self-assemblable polymer.…
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Operations & Transport · mapped topic
Operations & Transport · mapped topic
- G03F7/0002Primary
Physics · mapped topic
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Frequently asked questions
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- What does patent US9011978B2 cover?
- Treatment of a layer comprising self-assemblable polymer at a surface of a substrate is disclosed. In an embodiment, the treatment includes arranging a zone of temperature change to sweep across the layer, wherein a temperature of the layer within the zone differs from an initial temperature of the layer prior to passage of the zone.
- Who is the assignee on this patent?
- Koole Roelof, Banine Vadim Yevgenyevich, Wuister Sander Frederik, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification G03F7/0002. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Apr 21 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).