Optical measuring device

Patent metadata

Field	Value
Publication number	US-9006657-B2
Application number	US-201113305038-A
Country	US
Kind code	B2
Filing date	Nov 28, 2011
Priority date	Dec 17, 2010
Publication date	Apr 14, 2015
Grant date	Apr 14, 2015

Abstract

In an optical measuring device, the visual observation section includes: a white light source which emits white light; a first objective lens arranged between the white light source and measurement object, through which the white light emitted from the white light source and return light from the measurement object transmit; a plurality of tube lenses which change a magnification of the return light passing through the first objective lens to a predetermined magnification; and a lens switching mechanism which can selectively switch the tube lenses so as to select one of the tube lenses to be arranged on the return light, and the special observation section includes: a special light source which emits special light; and a second objective lens arranged between the special light source and measurement object, through which the special light emitted from the special light source and return light from the measurement object transmit.

First claim

What is claimed is:

1. An optical measuring device comprising:
a visual observation section for performing a visual observation of a measurement object; and
a special observation section for performing a special observation of the measurement object,
wherein the visual observation section includes:
a white light source which emits white light;
a first objective lens arranged between the white light source and the measurement object, through which lens the white light emitted from the white light source and return light from the measurement object transmit;
a plurality of tube lenses which change a magnification of the return light passing through the first objective lens to a predetermined magnification; and
a lens switching mechanism which can selectively switch the tube lenses so as to select one of the tube lenses which is to be arranged on the return light,

wherein the special observation section includes:
a special light source which emits special light; and
a second objective lens arranged between the special light source and the measurement object, through which lens the special light emitted from the special light source and return light from the measurement object transmit, and

wherein the first objective lens and the second objective lens are moved integrally to position only one of the first objective lens and the second objective lens opposite to the measurement object.

2. The optical measuring device according to claim 1 , wherein the special light is near infrared light.

3. The optical measuring device according to claim 1 , further comprising:
an excitation filter arranged between the special light source and the second objective lens, through which filter only excitation light having a wavelength for making a fluorescence emitted from the measurement object transmits; and
a fluorescence filter through which only the fluorescence emitted from the measurement object, out of the return light passing through the second objective lens, transmits,
wherein the special light is excitation light, and
wherein the excitation light passing through the excitation filter, out of the excitation light emitted from the special light source, transmits through the second objective lens.

Assignees

• Okabe Kenji
• Nagahama Tatsuya
• Kaneko Nobuya
• Mitutoyo Corp

Inventors

• Okabe Kenji
• Nagahama Tatsuya
• Kaneko Nobuya

Classifications

• G02B21/248 Primary

  objective (or ocular) turrets · CPC title

• G01N21/64 Primary

  Fluorescence; Phosphorescence · CPC title

• G01N21/25

  Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands · CPC title

• G01N21/956 Primary

  Inspecting patterns on the surface of objects {(contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20)} · CPC title

• G01B11/30

  for measuring roughness or irregularity of surfaces · CPC title