Methods of forming films including germanium tin and structures and devices including the films
US-2015048485-A1 · Feb 19, 2015 · US
Chamber sealing member
US9005539B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9005539-B2 |
| Application number | US-201213677151-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 14, 2012 |
| Priority date | Nov 23, 2011 |
| Publication date | Apr 14, 2015 |
| Grant date | Apr 14, 2015 |
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Abstract
Official abstract text for this publication.
A reaction chamber including an upper region for processing a substrate, a lower region for loading a substrate, a susceptor movable within the reaction chamber, a first sealing member positioned on a perimeter of the susceptor, a second sealing member positioned between the upper region and the lower region, wherein the first and second sealing members are selectively engaged with one another to limit communication between the upper region and the lower region.
First claim
Opening claim text (preview).
We claim: 1. A reaction chamber comprising: an upper region for processing a substrate; a lower region for loading a substrate; a susceptor movable within the reaction chamber; a first sealing member positioned on a perimeter of the susceptor; a second sealing member positioned between the upper region and the lower region; wherein the first and second sealing members are selectively engaged with one another to limit communication between the upper region and the lower r…
Assignees
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Classifications
- H10P72/0441Primary
Electricity · mapped topic
Chemistry & Metallurgy · mapped topic
- B01J19/0073Primary
Operations & Transport · mapped topic
Operations & Transport · mapped topic
- C23C16/4409Primary
Chemistry & Metallurgy · mapped topic
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- What does patent US9005539B2 cover?
- A reaction chamber including an upper region for processing a substrate, a lower region for loading a substrate, a susceptor movable within the reaction chamber, a first sealing member positioned on a perimeter of the susceptor, a second sealing member positioned between the upper region and the lower region, wherein the first and second sealing members are selectively engaged with one another …
- Who is the assignee on this patent?
- Asm Ip Holding Bv
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0441. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Apr 14 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 2 related publications on this page (citations in our corpus or others sharing the same primary CPC).