Methods for chemical mechanical polishing and forming interconnect structure
US-2024290629-A1 · Aug 29, 2024 · US
Aqueous polishing agent and graft copolymers and their use in a process for polishing patterned and unstructured metal surfaces
US9005472B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9005472-B2 |
| Application number | US-201113580039-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 19, 2011 |
| Priority date | Feb 24, 2010 |
| Publication date | Apr 14, 2015 |
| Grant date | Apr 14, 2015 |
How to read this patent
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
- Title
What the patent document calls the invention.
- Abstract
A short plain-language summary of the technical disclosure.
- Assignees and inventors
Who owns or filed the patent and who is credited as inventor.
- Key dates
Filing, priority, publication, and grant dates set the timeline.
- First independent claim
The legal scope of protection — read this for what is actually claimed.
- CPC / IPC classifications
Technology tags used to group this patent with similar filings.
- Citations and related patents
Prior art links and similar publications in this corpus.
Abstract
Official abstract text for this publication.
An aqueous polishing agent, comprising, as the abrasive, at least one kind of polymer particles (A) finely dispersed in the aqueous phase and having at their surface a plurality of at least one kind of functional groups (a1) capable of interacting with the metals and/or the metal oxides on top of the surfaces to be polished and forming complexes with the said metals and metal cations, the said polymer particles (A) being preparable by the emulsion or suspension polymerization of at least one monomer containing at least one radically polymerizable double bond in the presence of at least one oligomer or polymer containing a plurality of functional groups (a1); graft copolymers preparable by the emulsion or suspension polymerization of at least one monomer containing at least one radically polymerizable double bond in the presence of at least one oligomeric or polymeric aminotriazine-polyamine condensate; and a process for the chemical and mechanical polishing of patterned and unstructured metal surfaces making use of the said aqueous polishing agent.
First claim
Opening claim text (preview).
The invention claimed is: 1. An aqueous polishing agent, comprising: polymer particles comprising graft copolymers finely dispersed in an aqueous phase and a functional group on a surface of the particles, wherein: the functional group is capable of interacting with a metal, a metal oxide, or both, on top of a surface to be polished; the functional group is capable of forming a complex with the metal, a metal cation, or both; the particles are obtained by a process compris…
Assignees
Inventors
Classifications
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
- C09G1/02Primary
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Patent family
Related publications grouped by family.
External sources
Next steps
Free tools are coming soon. Tell us what you want to track and we'll notify you.
Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US9005472B2 cover?
- An aqueous polishing agent, comprising, as the abrasive, at least one kind of polymer particles (A) finely dispersed in the aqueous phase and having at their surface a plurality of at least one kind of functional groups (a1) capable of interacting with the metals and/or the metal oxides on top of the surfaces to be polished and forming complexes with the said metals and metal cations, the said …
- Who is the assignee on this patent?
- Raman Vijay Immanuel, Gubaydullin Ilshat, Brands Mario, and 3 more
- What technology area does this patent fall under?
- Primary CPC classification C09G1/02. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Apr 14 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).