Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter
US-9195152-B2 · Nov 24, 2015 · US
US9001971B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9001971-B2 |
| Application number | US-201213685960-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 27, 2012 |
| Priority date | Dec 2, 2011 |
| Publication date | Apr 7, 2015 |
| Grant date | Apr 7, 2015 |
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According to one embodiment, an X-ray diagnostic apparatus includes an X-ray generation unit, X-ray detection unit, X-ray beam limiting unit, and X-ray beam limiting control unit. The X-ray generation unit generates X-rays. The X-ray detection unit detects the X-rays generated by the X-ray generation unit and transmitted through an object placed on a tabletop. The X-ray beam limiting unit includes a plurality of filters to harden radiation quality of the generated X-rays. The X-ray beam limiting control unit controls the X-ray beam limiting unit to place a filter between the X-ray generation unit and the object, which filter is specified from the plurality of filters based on the thickness of the object and the distance between the X-ray generation unit and the X-ray detection unit.
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What is claimed is: 1. An X-ray diagnostic apparatus comprising: an X-ray generation unit configured to generate X-rays; an X-ray detection unit configured to detect the X-rays generated by the X-ray generation unit and transmitted through an object placed on a tabletop; an X-ray beam limiting unit including a plurality of filters configured to harden radiation quality of the generated X-rays; and an X-ray beam limiting control unit configured to control the X-ray beam limit…
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