Photodetector
US-12046618-B2 · Jul 23, 2024 · US
Avalanche photodiodes and methods of fabricating the same
US8999744B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8999744-B2 |
| Application number | US-201414220431-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 20, 2014 |
| Priority date | Nov 3, 2010 |
| Publication date | Apr 7, 2015 |
| Grant date | Apr 7, 2015 |
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Abstract
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Provided are an avalanche photodiode and a method of fabricating the same. The method of fabricating the avalanche photodiode includes sequentially forming a compound semiconductor absorption layer, a compound semiconductor grading layer, a charge sheet layer, a compound semiconductor amplification layer, a selective wet etch layer, and a p-type conductive layer on an n-type substrate through a metal organic chemical vapor deposition process.
First claim
Opening claim text (preview).
What is claimed is: 1. A method of fabricating an avalanche photodiode, comprising: forming a compound semiconductor absorption layer, a compound semiconductor grading layer, a charge sheet layer, a compound semiconductor amplification layer, a selective wet etch layer, and a p-type conductive layer on an n-type substrate, wherein the compound semiconductor absorption layer, the compound semiconductor grading layer, the charge sheet layer, the compound semiconductor amplificatio…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H10F30/225Primary
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US8999744B2 cover?
- Provided are an avalanche photodiode and a method of fabricating the same. The method of fabricating the avalanche photodiode includes sequentially forming a compound semiconductor absorption layer, a compound semiconductor grading layer, a charge sheet layer, a compound semiconductor amplification layer, a selective wet etch layer, and a p-type conductive layer on an n-type substrate through a…
- Who is the assignee on this patent?
- Korea Electronics Telecomm
- What technology area does this patent fall under?
- Primary CPC classification H10F30/225. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Apr 07 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).