Method and apparatus for manufacturing organic el device

Patent metadata

Field	Value
Publication number	US-8999735-B2
Application number	US-201214115793-A
Country	US
Kind code	B2
Filing date	Dec 10, 2012
Priority date	Dec 27, 2011
Publication date	Apr 7, 2015
Grant date	Apr 7, 2015

Abstract

Provided are a method and an apparatus for manufacturing an organic EL device which enable deposition of a vaporized material from an evaporation source onto a substrate in a desired pattern, while eliminating the need for a conventional strip-shaped shadow mask. A shielding portion 51 is configured to be switchable between a shield position where the shielding portion 51 is arranged between an evaporation source 4 and a substrate 81 so as to shield the substrate 81 and a shield release position where the shielding portion 51 is withdrawn from between the evaporation source 4 and the substrate 81 so as to release the shielding of the substrate 81 . The shielding portion 51 is switched between the shield position and the shield release position while rotating together with a roller 3.

First claim

The invention claimed is:

1. A method for manufacturing an organic EL device, comprising the steps of:
providing a substrate having a strip shape while the substrate is in contact with a roller;
depositing a vaporized material onto a predetermined part of the substrate by discharging the vaporized material from an evaporation source; and
arranging a shielding portion for shielding the substrate between the evaporation source and the substrate so as to prevent the deposition of…

Assignees

• Nitto Denko Corp

Inventors

• Kakiuchi Ryohei
• Yamamoto Satoru
• Hida Kanako

Classifications

• H10K50/11

  Electricity · mapped topic

• C23C14/042 Primary

  Chemistry & Metallurgy · mapped topic

• H01L51/5012 Primary

  Electricity · mapped topic

• C23C14/562

  Chemistry & Metallurgy · mapped topic

• H01L51/001

  Electricity · mapped topic