Method of forming an MT-propyl siloxane resin
US-9221848-B2 · Dec 29, 2015 · US
Cyclic amino compounds for low-k silylation
US8999734B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8999734-B2 |
| Application number | US-72136210-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 10, 2010 |
| Priority date | Mar 10, 2009 |
| Publication date | Apr 7, 2015 |
| Grant date | Apr 7, 2015 |
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- Title
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Abstract
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Disclosed herein are mono-functional silylating compounds that may exhibit enhanced silylating capabilities. Also disclosed are method of synthesizing and using these compounds. Finally methods to determine effective silylation are also disclosed.
First claim
Opening claim text (preview).
What is claimed is: 1. A method of repairing a dielectric film previously damaged by a processing step(s), the method comprising the step of: contacting the dielectric film with a repair agent having a formula R 3 SiL, wherein each R is independently selected from the group consisting of H, methyl, and ethyl; L is a nitrogen-containing ring selected from the group consisting of 1,2,3-triazole, piperidine, 1-methylpiperazine, pyrolidine, and pyrazole; and one nitrogen in the nitrog…
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Electricity · mapped topic
Electricity · mapped topic
- C07F7/10Primary
Chemistry & Metallurgy · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US8999734B2 cover?
- Disclosed herein are mono-functional silylating compounds that may exhibit enhanced silylating capabilities. Also disclosed are method of synthesizing and using these compounds. Finally methods to determine effective silylation are also disclosed.
- Who is the assignee on this patent?
- Mcandrew James J F, Anderson Curtis, Dussarrat Christian, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification C07F7/10. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Apr 07 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).