Method for producing a refractive or diffractive optical device
US-9529127-B2 · Dec 27, 2016 · US
US8999435B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8999435-B2 |
| Application number | US-85907610-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 18, 2010 |
| Priority date | Aug 31, 2009 |
| Publication date | Apr 7, 2015 |
| Grant date | Apr 7, 2015 |
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A process of producing a grating to be used in an X-ray image pickup apparatus includes the steps of preparing a grating having a plurality of protrusions periodically arranged, curving the grating in the direction in which the plurality of protrusions is arranged, and filling spaces between the protrusions with a metal in a state that the grating is curved.
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What is claimed is: 1. A process of producing a grating to be used in an X-ray image pickup apparatus, comprising the steps of: preparing a grating having a plurality of protrusions periodically arranged; and filling spaces between the protrusions with a metal, wherein the step of preparing the grating includes: forming a seed layer on one surface of a Si substrate, and forming the plurality of protrusions on the seed layer by etching the Si substrate to expose the seed la…
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