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US8999028B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8999028-B2 |
| Application number | US-201313924396-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 21, 2013 |
| Priority date | Mar 15, 2013 |
| Publication date | Apr 7, 2015 |
| Grant date | Apr 7, 2015 |
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Abstract
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An apparatus for controlling a flow of gas comprises a spiral path guiding member. The spiral path guiding member comprises at least two groups of guiding plates. Each guiding plate of each group is disposed in an axial direction to form a longitudinal axis. Each group is spaced apart in the longitudinal direction. A surface of each guiding plate is substantially parallel to the longitudinal axis. At least one guiding plate of each group has a guiding plate opening. Guiding plate openings of the guiding plates may facilitate gas to flow in a spiral flow path.
First claim
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What is claimed is: 1. An apparatus for controlling a flow of gas, comprising: a spiral path guiding member comprising at least two groups of guiding plates, each guiding plate of each group disposed in an axial direction from a longitudinal axis, each group spaced apart in the longitudinal direction, a surface of each guiding plate being substantially parallel to the longitudinal axis, at least one guiding plate of each group having a guiding plate opening, wherein guiding plate…
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Cross-Sectional Technologies · mapped topic
Chemistry & Metallurgy · mapped topic
- C23C16/345Primary
Chemistry & Metallurgy · mapped topic
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- What does patent US8999028B2 cover?
- An apparatus for controlling a flow of gas comprises a spiral path guiding member. The spiral path guiding member comprises at least two groups of guiding plates. Each guiding plate of each group is disposed in an axial direction to form a longitudinal axis. Each group is spaced apart in the longitudinal direction. A surface of each guiding plate is substantially parallel to the longitudinal ax…
- Who is the assignee on this patent?
- Macronix Int Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification C23C16/345. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Apr 07 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).