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US-2015371872-A1 · Dec 24, 2015 · US
Prevention of particle adders when contacting a liquid meniscus over a substrate
US8997684B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8997684-B2 |
| Application number | US-201113250872-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 30, 2011 |
| Priority date | Apr 18, 2011 |
| Publication date | Apr 7, 2015 |
| Grant date | Apr 7, 2015 |
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Abstract
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A method for meniscus processing a substrate is provided. The method initiates with generating a meniscus spanning at least a length of the substrate. A pre-wetting liquid or vapor is dispensed. A substrate is moved through the dispensed pre-wetting liquid or vapor and the meniscus. The dispensed pre-wetting vapor condenses a pre-wetting liquid over a region of the substrate adjacent to a region of the substrate where the meniscus is generated. The pre-wetting liquid is deposited without substantially generating surface flow of the pre-wetting liquid on the substrate, and the pre-wetting liquid prevents the leading edge of the meniscus from contacting a dry surface region of the substrate.
First claim
Opening claim text (preview).
What is claimed is: 1. A system for meniscus processing a substrate, comprising: a proximity head having a plurality of delivery conduits for providing a process liquid to a surface of the substrate and a plurality of return conduits for removing the process liquid from the surface of the substrate, the plurality of delivery conduits and the plurality of return conduits generating a meniscus spanning at least a length of the first surface of the substrate; a pre-wetting dispense…
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Electricity · mapped topic
- H10P72/0426Primary
Electricity · mapped topic
Cross-Sectional Technologies · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
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Frequently asked questions
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- What does patent US8997684B2 cover?
- A method for meniscus processing a substrate is provided. The method initiates with generating a meniscus spanning at least a length of the substrate. A pre-wetting liquid or vapor is dispensed. A substrate is moved through the dispensed pre-wetting liquid or vapor and the meniscus. The dispensed pre-wetting vapor condenses a pre-wetting liquid over a region of the substrate adjacent to a regio…
- Who is the assignee on this patent?
- Magni Enrico, Gupta Suresh, Gahagan Mark, and 3 more
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0426. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Apr 07 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).