Systems and methods for mems gyroscope shock robustness
US-2015330783-A1 · Nov 19, 2015 · US
US8997569B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8997569-B2 |
| Application number | US-201113241942-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 23, 2011 |
| Priority date | Jun 16, 2010 |
| Publication date | Apr 7, 2015 |
| Grant date | Apr 7, 2015 |
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A compound sensor includes a first unit including first and second oscillators symmetrically disposed to each other and being able to be displaced in a driving direction and a detecting direction; a second unit including third and fourth oscillators symmetrically disposed to each other and being able to be displaced in the driving direction and the detecting direction; a drive unit to drive the first through fourth oscillators so as to oscillate the first and second oscillators in opposite phase, and the third and fourth oscillators in opposite phase, and so as to oscillate the first and second unit in opposite phase; and a detection unit configured to detect displacements of the first through fourth oscillators in the detecting direction, wherein an acceleration, angular rate, angular acceleration and centrifugal force are independently detected by canceling unnecessary inertial force components from the displacements of the first through fourth oscillators.
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The invention claimed is: 1. A compound sensor comprising: a first unit including first and second oscillators symmetrically disposed to each other and being able to be displaced in a driving direction and a detecting direction; a second unit including third and fourth oscillators symmetrically disposed to each other and being able to be displaced in the driving direction and the detecting direction; a drive unit configured to drive the first, second, third and fourth oscilla…
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
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