Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components
US-2015377624-A1 · Dec 31, 2015 · US
US8997566B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8997566-B2 |
| Application number | US-201113116821-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 26, 2011 |
| Priority date | Jun 2, 2010 |
| Publication date | Apr 7, 2015 |
| Grant date | Apr 7, 2015 |
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A yaw rate sensor is described which includes a drive device, at least one Coriolis element, and a detection device having at least two detection elements which are coupled to one another with the aid of a coupling device, the drive device being connected to the Coriolis element for driving a vibration of the Coriolis element, and an additional coupling device which is connected to the detection device and to the Coriolis element for coupling a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration.
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What is claimed is: 1. A yaw rate sensor, comprising: a drive device; at least one Coriolis element, the drive device being connected to the Coriolis element for driving a vibration of the Coriolis element; a detection device having at least two detection elements which are coupled to one another with the aid of a coupling device; and an additional coupling device which is connected to the detection device and to the Coriolis element for coupling a deflection in a plane of v…
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