Electroluminescence inspection apparatus
US-2024255563-A1 · Aug 1, 2024 · US
US8997028B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8997028-B2 |
| Application number | US-201313867621-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 22, 2013 |
| Priority date | Oct 23, 2007 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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Impact on parametric performance of physical design choices for transistors is scored for on-current and off-current of the transistors. The impact of the design parameters are incorporated into parameters that measure predicted shift in mean on-current and mean off-current and parameters that measure predicted increase in deviations in the distribution of on-current and the off-current. Statistics may be taken at a cell level, a block level, or a chip level to optimize a chip design in a design phase, or to predict changes in parametric yield during manufacturing or after a depressed parametric yield is observed. Further, parametric yield and current level may be predicted region by region and compared with observed thermal emission to pinpoint any anomaly region in a chip to facilitate detection and correction in any mistakes in chip design.
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What is claimed is: 1. A method of identifying a location of anomalous functionality on a semiconductor chip, said method comprising: by a computer: determining at least one of spatial distribution of on-current within said semiconductor chip and spatial distribution of off-current within said semiconductor chip; converting one of said spatial distribution of on-current and said spatial distribution of said off-current into an estimated spatial temperature distribution map; and…
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