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Micromechanical tunable Fabry-Perot interferometer and a method for producing the same
US8995044B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8995044-B2 |
| Application number | US-201013498143-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 24, 2010 |
| Priority date | Sep 24, 2009 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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- Title
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Abstract
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The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Micromechanical interferometers of the prior art have a disadvantage of significantly attenuating infrared radiation. In the inventive solution there is a gap in at least one mirror, serving as a layer of the mirror. The other layers of the mirrors can be made of polycrystalline silicon, which has a negligible attenuation at the infrared range. It is also preferable to provide a hole or a recess in a substrate at the optical area of the interferometer.
First claim
Opening claim text (preview).
The invention claimed is: 1. An electronically tunable Fabry-Perot interferometer, comprising a substrate including a portion defining an optical area; a first mirror structure on the substrate; a second, movable mirror structure, whereby the first and second mirror structures define respective first and second mirrors which are substantially parallel to each other, and each of the first and second mirrors extend along the optical area; a Fabry-Perot cavity between the firs…
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Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
- G01J3/26Primary
Physics · mapped topic
Physics · mapped topic
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- What does patent US8995044B2 cover?
- The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Micromechanical interferometers of the prior art have a disadvantage of significantly attenuating infrared radiation. In the inventive solution there is a gap in at least one mirror, serving as a layer of the mirror. The other layers of the mirrors can be made of polycrys…
- Who is the assignee on this patent?
- Blomberg Martti, Teknologian Tutkimuskeskus Vtt Oy
- What technology area does this patent fall under?
- Primary CPC classification G01J3/26. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).