Optical measurement method, optical measurement apparatus, and non-transitory storage medium storing optical measurement program
US-2024319486-A1 · Sep 26, 2024 · US
US8994811B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8994811-B2 |
| Application number | US-201113575776-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 21, 2011 |
| Priority date | Jan 27, 2010 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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Disclosed is a diffraction microscopy capable of reducing influence of an increase in the incident angle range of a beam. Specifically disclosed is a diffraction microscopy in which a beam is incident on a sample, in which the intensity of a diffraction pattern from the sample is measured, and in which an image of an object is rebuilt using Fourier interactive phase retrieval on the basis of the measured intensity of the diffraction pattern. In this method, Fourier interactive phase retrieval is performed using deconvolution on the diffraction pattern subjected to convolution by the increase in the incident angle range of the beam.
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The invention claimed is: 1. A diffraction microscopy method that radiates a beam on a sample, measures an intensity of a diffraction pattern from the sample, and uses a Fourier iterative phase retrieval based on the measured intensity of the diffraction pattern to reconfigure an image of an object, wherein deconvolution is incorporated into the Fourier iterative phase retrieval for a diffraction pattern convoluted by an angle spread of incident beam, and both are sequentially upd…
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