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US-12132089-B2 · Oct 29, 2024 · US
Semiconductor device having plural patterns extending in the same direction
US8994151B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8994151-B2 |
| Application number | US-201313899826-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 22, 2013 |
| Priority date | May 31, 2012 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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Abstract
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A photomask has a mask blank and a light shielding film formed on the mask blank. The light shielding film includes a plurality of opening traces extending in a first direction. An end of a first opening trace in the first direction and an end of a second opening trace in the first direction are in different positions in the first direction. The second opening trace adjoins the first opening trace.
First claim
Opening claim text (preview).
What is claimed is: 1. A semiconductor device comprising: a semiconductor substrate on which a predetermined layer is formed; a first pattern extending in plan view in a first direction in the predetermined layer; a second pattern extending in the plan view in parallel with the first pattern in the predetermined layer; and a third pattern between the first and second patterns extending in the plan view in parallel with the first and second patterns in the predetermined layer…
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Physics · mapped topic
Physics · mapped topic
Electricity · mapped topic
- H10W20/089Primary
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US8994151B2 cover?
- A photomask has a mask blank and a light shielding film formed on the mask blank. The light shielding film includes a plurality of opening traces extending in a first direction. An end of a first opening trace in the first direction and an end of a second opening trace in the first direction are in different positions in the first direction. The second opening trace adjoins the first opening tr…
- Who is the assignee on this patent?
- Elpida Memory Inc, Ps4 Luxco Sarl
- What technology area does this patent fall under?
- Primary CPC classification H10W20/089. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).