Semiconductor device including pillar transistors

US8994098B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8994098-B2
Application numberUS-201313938446-A
CountryUS
Kind codeB2
Filing dateJul 10, 2013
Priority dateJul 12, 2012
Publication dateMar 31, 2015
Grant dateMar 31, 2015

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Abstract

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A first pillar transistor and a second pillar transistor are arranged with no other pillar transistor therebetween, a distance between a first silicon pillar in the first pillar transistor and a second silicon pillar in the second pillar transistor is smaller than a distance between a third silicon pillar in a third pillar transistor and the first silicon pillar.

First claim

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What is claimed is: 1. A semiconductor device comprising: a first pillar transistor including a first diffusion layer on an upper portion of a first silicon pillar formed on a substrate, a second diffusion layer on a lower portion of the first silicon pillar, and a first gate electrode formed via a first gate insulator film so as to cover a surface of the first silicon pillar between the first diffusion layer and the second diffusion layer; a second pillar transistor including a…

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What does patent US8994098B2 cover?
A first pillar transistor and a second pillar transistor are arranged with no other pillar transistor therebetween, a distance between a first silicon pillar in the first pillar transistor and a second silicon pillar in the second pillar transistor is smaller than a distance between a third silicon pillar in a third pillar transistor and the first silicon pillar.
Who is the assignee on this patent?
Elpida Memory Inc, Ps4 Luxco Sarl
What technology area does this patent fall under?
Primary CPC classification H10D84/83. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).