Vertical NAND device with shared word line steps
US-9224747-B2 · Dec 29, 2015 · US
US8994092B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8994092-B2 |
| Application number | US-201314103829-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 11, 2013 |
| Priority date | Dec 19, 2012 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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A semiconductor device including a nonvolatile memory cell with a high performance and also a high reliability is provided. A nonvolatile memory cell includes a first n-well, a second n-well separated from the first n-well in a first direction, a selection transistor formed in the first n-well, a floating gate electrode formed to overlap with a part of the first n-well and a part of the second n-well in a plan view, and an n-conductivity-type semiconductor regions formed in the second n-well on both sides of the floating gate electrode. In write operation, −7 V is applied to the drain of a selected nonvolatile memory cell, −8 V is applied to the gate electrode of the selection transistor, and further −3 V is applied to the n-conductivity-type semiconductor region for obtaining a higher write speed. Thereby, a selected nonvolatile memory cell is discriminated from an unselected nonvolatile memory cell.
Opening claim text (preview).
What is claimed is: 1. A semiconductor device comprising a first nonvolatile memory cell formed on a semiconductor substrate having a first conductivity type, the first nonvolatile memory cell including: (a) a first well which is formed on a major surface of the semiconductor substrate and has a second conductivity type different from the first conductivity type, and a first active region formed in the first well; (b) a second well which is formed on the major surface of the s…
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