Vertical type semiconductor devices and methods of manufacturing the same
US-2024172441-A1 · May 23, 2024 · US
US8994091B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8994091-B2 |
| Application number | US-201213458293-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 27, 2012 |
| Priority date | May 3, 2011 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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A non-volatile memory device having a vertical structure includes a semiconductor layer, a sidewall insulation layer extending in a vertical direction on the semiconductor layer, and having one or more protrusion regions, first control gate electrodes arranged in the vertical direction on the semiconductor layer, and respectively contacting one of portions of the sidewall insulation layer where the one or more protrusion regions are not formed and second control gate electrodes arranged in the vertical direction on the semiconductor layer, and respectively contacting one of the one or more protrusion regions.
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What is claimed is: 1. A non-volatile memory device having a vertical structure, the non-volatile memory device comprising: a semiconductor layer; a sidewall insulation layer extending in a vertical direction on the semiconductor layer, and having one or more protrusion regions; a plurality of first control gate electrodes arranged in the vertical direction on the semiconductor layer; and a plurality of second control gate electrodes arranged in the vertical direction on the…
Electricity · mapped topic
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