Semiconductor devices grown on indium-containing substrates utilizing indium depletion mechanisms

US8994071B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8994071-B2
Application numberUS-201013264509-A
CountryUS
Kind codeB2
Filing dateApr 30, 2010
Priority dateMay 5, 2009
Publication dateMar 31, 2015
Grant dateMar 31, 2015

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Abstract

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We have observed anomalous behavior of II-VI semiconductor devices grown on certain semiconductor substrates, and have determined that the anomalous behavior is likely the result of indium atoms from the substrate migrating into the II-V layers during growth. The indium can thus become an unintended dopant in one or more of the II-VI layers grown on the substrate, particularly layers that are close to the growth substrate, and can detrimentally impact device performance. We describe a variety of semiconductor constructions and techniques effective to deplete the migrating indium within a short distance in the growth layers, or to substantially prevent indium from migrating out of the substrate, or to otherwise substantially isolate functional II-VI layers from the migrating indium, so as to maintain good device performance.

First claim

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The invention claimed is: 1. A semiconductor construction, comprising: a III-V semiconductor substrate that contains indium; at least first and second II-VI semiconductor layers formed atop the III-V semiconductor substrate, the first II-VI semiconductor layer being disposed between the second II-VI semiconductor layer and the III-V semiconductor substrate; and an interface disposed between the III-V semiconductor substrate and the first II-VI semiconductor layer; wherein th…

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What does patent US8994071B2 cover?
We have observed anomalous behavior of II-VI semiconductor devices grown on certain semiconductor substrates, and have determined that the anomalous behavior is likely the result of indium atoms from the substrate migrating into the II-V layers during growth. The indium can thus become an unintended dopant in one or more of the II-VI layers grown on the substrate, particularly layers that are c…
Who is the assignee on this patent?
Miller Thomas J, Haase Michael A, Sun Xiaoguang, and 1 more
What technology area does this patent fall under?
Primary CPC classification H10H20/823. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).