Method and system for optical characterization of patterned samples
US-2015316468-A1 · Nov 5, 2015 · US
Color time domain integration camera having a single charge coupled device and fringe projection auto-focus system
US8993974B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8993974-B2 |
| Application number | US-201313790295-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 8, 2013 |
| Priority date | Jun 12, 2012 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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Abstract
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A detector ( 550 ) for detecting light ( 248 B) from a light source ( 248 A) comprises a single array of pixels ( 574 ) and a first mask ( 576 ). The single array of pixels ( 574 ) includes a plurality of rows of pixels ( 574 R), and a plurality of columns of pixels ( 574 C) having at least a first active column of pixels ( 574 AC) and a spaced apart second active column of pixels ( 574 AC). The first mask ( 576 ) covers one of the plurality of columns of pixels ( 574 C) to provide a first masked column of pixels ( 574 MC) that is positioned between the first active column of pixels ( 574 AC) and the second active column of pixels ( 574 AC). Additionally, a charge is generated from the light ( 248 B) impinging on the first active column of pixels ( 574 AC), is transferred to the first masked column of pixels ( 574 MC), and subsequently is transferred to the second active column of pixels ( 574 AC).
First claim
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What is claimed is: 1. A detector for detecting light from a light source, the detector comprising: a single array of pixels including (i) a plurality of rows of pixels and (ii) a plurality of columns of pixels having at least a first active column of pixels and a spaced apart second active column of pixels; wherein the first active column of pixels and the second active column of pixels are arranged along a first direction, and are spaced apart from one another along a second dir…
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Frequently asked questions
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- What does patent US8993974B2 cover?
- A detector ( 550 ) for detecting light ( 248 B) from a light source ( 248 A) comprises a single array of pixels ( 574 ) and a first mask ( 576 ). The single array of pixels ( 574 ) includes a plurality of rows of pixels ( 574 R), and a plurality of columns of pixels ( 574 C) having at least a first active column of pixels ( 574 AC) and a spaced apart second active column of pixels ( 574 AC). Th…
- Who is the assignee on this patent?
- Nikon Corp
- What technology area does this patent fall under?
- Primary CPC classification G01B11/25. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).