Mounting structures for multi-detector electron microscopes

US8993963B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8993963-B2
Application numberUS-201414325166-A
CountryUS
Kind codeB2
Filing dateJul 7, 2014
Priority dateDec 12, 2008
Publication dateMar 31, 2015
Grant dateMar 31, 2015

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Abstract

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A detector support for an electron microscope including a detector support ring and flexible elements, wherein a first end of each of the flexible elements is connected to the support ring, and wherein the detector support ring and the flexible elements are configured to support at least two detectors in a circumferential arrangement around an optical axis of the electron microscope such that an optical axis of each of the at least two detectors intersects the optical axis of the electron microscope and a target point of the at least two detectors is maintained relatively constant over a temperature change.

First claim

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We claim as follows: 1. An electron microscope, comprising: a detector mounting structure; and at least two detectors supported by the detector mounting structure such that an optical axis of each of the at least two detectors intersects an optical axis of the electron microscope, wherein the detector mounting structure is configured to cause a translation of the at least two detectors parallel to the optical axis of the electron microscope in response to a change in temperatu…

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What does patent US8993963B2 cover?
A detector support for an electron microscope including a detector support ring and flexible elements, wherein a first end of each of the flexible elements is connected to the support ring, and wherein the detector support ring and the flexible elements are configured to support at least two detectors in a circumferential arrangement around an optical axis of the electron microscope such that a…
Who is the assignee on this patent?
Fei Co
What technology area does this patent fall under?
Primary CPC classification H01J37/244. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).