Thin film structures and devices with integrated light and heat blocking layers for laser patterning

Patent metadata

Field	Value
Publication number	US-8993443-B2
Application number	US-201213570190-A
Country	US
Kind code	B2
Filing date	Aug 8, 2012
Priority date	Aug 8, 2011
Publication date	Mar 31, 2015
Grant date	Mar 31, 2015

Abstract

Selective removal of specified layers of thin film structures and devices, such as solar cells, electrochromics, and thin film batteries, by laser direct patterning is achieved by including heat and light blocking layers in the device/structure stack immediately adjacent to the specified layers which are to be removed by laser ablation. The light blocking layer is a layer of metal that absorbs or reflects a portion of the laser energy penetrating through the dielectric/semiconductor layers and the heat blocking layer is a conductive layer with thermal diffusivity low enough to reduce heat flow into underlying metal layer(s), such that the temperature of the underlying metal layer(s) does not reach the melting temperature, T m , or in some embodiments does not reach (T m )/3, of the underlying metal layer(s) during laser direct patterning.

First claim

What is claimed is:

1. A method of laser direct patterning a thin film device by a laser beam for selective removal of dielectric and/or semiconductor layers, comprising:
providing a thin film device comprising:
a substrate;
a first device layer covering said substrate;
a first heat blocking layer covering said first device layer,
a first light blocking layer covering said first heat blocking layer; and
a second device layer covering said first light blocking layer; and

laser direct patterning said thin film device, said laser beam removing a laser irradiated portion of said second device layer while leaving said first device layer intact, wherein said laser beam passes through said second device layer before reaching said first light blocking layer;
wherein said first light blocking layer is a layer of metal that absorbs or reflects a portion of the laser energy penetrating through said second device layer toward said first device layer and said first heat blocking layer is a conductive layer with thermal diffusivity, D, low enough to reduce heat flow into said first device layer from said second device layer such that the temperature of said first device layer does not reach the melting temperature, Tm′, of said first device layer during laser direct patterning.

2. The method of claim 1 , wherein said thin film device further comprises a second heat blocking layer within said second device layer and a second light blocking layer covering said second heat blocking layer, and wherein said second device layer comprises a first portion of said second device layer covered by said second heat blocking layer and a second portion of said second device layer covering said second light blocking layer, and wherein said second light blocking layer is a layer of metal that absorbs or reflects a portion of the laser energy penetrating through said second portion of said second device layer towards said first portion of said second device layer and said second heat blocking layer is a conductive layer with thermal diffusivity, D, low enough to reduce heat flow into said first portion of said second device layer from said second portion of said second device layer such that the temperature of said first portion of said second device layer does not reach the melting temperature, T m ″, of said first portion of said second device layer during laser direct patterning, and wherein said laser direct patterning further comprises removing a laser irradiated portion of said second portion of said second device layer while leaving said first portion of said second device layer intact.

3. The method of claim 2 , wherein said thin film device is a thin film battery, said first device layer is a current collector layer and said first portion of said second device layer is a stack comprising an anode current collector, an anode, an electrolyte and a cathode, and said second portion of said second device layer is a protective coating.

4. The method of claim 1 , wherein said substrate is a glass substrate.

5. The method of claim 1 , wherein said laser beam is a beam generated by a visible light laser.

6. The method of claim 1 , wherein said first heat blocking layer is a conductive layer with thermal diffusivity low enough to reduce heat flow into said first device layer from said second device layer such that the temperature of said first device layer does not reach (T m )/3 of said first device layer during laser direct patterning.

7. The method of claim 1 , wherein the thickness of said first heat blocking layer is greater than the thermal diffusion length, √(Dτ), wherein τ is the laser pulse duration.

8. The method of claim 1 , wherein said first light blocking layer and said first heat blocking layer are the same layer.

9. The method of claim 8 , wherein said first light blocking layer is a 10 nm layer of titanium and said laser beam is a beam generated by a picosecond laser.

10. The method of claim 1 , wherein said thin film device is a thin film battery.

11. The method of claim 10 , wherein said first device layer is a current collector layer and said second device layer is a stack comprising an anode current collector, an anode, an electrolyte and a cathode.

12. The method of claim 10 , wherein said first light blocking layer is a layer of gold metal, said layer of gold metal being less than 10 nanometers thick.

13. The method of claim 10 , wherein said first heat blocking layer is a layer of indium tin oxide.

14. The method of claim 13 , wherein said layer of indium tin oxide is greater than 100 nanometers thick and wherein said laser is a nanosecond pulse width laser.

15. The method of claim 1 , wherein the thermal diffusivity of said heat blocking layer is less than 0.1 cm 2 /s.

16. The method of claim 1 , further comprising laser direct patterning said thin film device using a second laser beam, the second laser direct patterning removing a laser irradiated portion of said first device layer, said first heat blocking layer, said first light blocking layer and said second device layer, wherein said second laser beam passes through said substrate before reaching said first light blocking layer, and wherein said first light blocking layer is a layer of metal that absorbs or reflects a portion of the laser energy from said second laser beam penetrating through said first device layer and said first heat blocking layer is a conductive layer with thermal diffusivity, D, low enough to reduce heat flow into said second device layer from said first device layer such that the temperature of said first device layer reaches the melting temperature, T m ′, of said first device layer during laser direct patterning with said second laser beam.

17. The method of claim 16 , wherein said substrate is a glass substrate and said second laser beam is a beam generated by an ultraviolet-visible laser.

Assignees

• Song Daoying
• Jiang Chong
• Kwak Byung-Sung Leo
• Gordon Ii Joseph G
• Applied Materials Inc

Inventors

• Song Daoying
• Jiang Chong
• Kwak Byung-Sung Leo
• Gordon Ii Joseph G

Classifications

• H10F19/33

  Patterning processes to connect the photovoltaic cells, e.g. laser cutting of conductive or active layers · CPC title

• H10F71/137 Primary

  Batch treatment of the devices · CPC title

• H10F77/707

  of the substrates or of layers on substrates, e.g. textured ITO layer on a glass substrate · CPC title

• H10F77/60

  Arrangements for cooling, heating, ventilating or compensating for temperature fluctuations · CPC title

• H10F77/311

  for photovoltaic cells · CPC title