Annealing for damage free laser processing for high efficiency solar cells
US-9214585-B2 · Dec 15, 2015 · US
US8993373B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8993373-B2 |
| Application number | US-201213464582-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 4, 2012 |
| Priority date | May 4, 2012 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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Methods of doping a solar cell, particularly a point contact solar cell, are disclosed. One surface of a solar cell may require portions to be n-doped, while other portions are p-doped. At least one lithography step can be eliminated by the use of a blanket doping of species having one conductivity and a patterned counterdoping process of species having the opposite conductivity. The areas doped during the patterned implant receive a sufficient dose so as to completely reverse the effect of the blanket doping and achieve a conductivity that is opposite the blanket doping. In some embodiments, counterdoped lines are also used to reduce lateral series resistance of the majority carriers.
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What is claimed is: 1. A method of creating a point contact solar cell, comprising: providing a substrate having a first conductivity; performing a blanket implant on a surface of said substrate with a species of a second conductivity, said second conductivity being opposite said first conductivity, so as to create a base of said first conductivity and an emitter of said second conductivity; performing a patterned implant of said surface of said substrate using a species of sa…
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