Solid-state imaging device and method for manufacturing the same

US8993369B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8993369-B2
Application numberUS-201113181630-A
CountryUS
Kind codeB2
Filing dateJul 13, 2011
Priority dateNov 4, 2003
Publication dateMar 31, 2015
Grant dateMar 31, 2015

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  2. Abstract

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  5. First independent claim

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Abstract

Official abstract text for this publication.

A method for manufacturing a solid-state imaging device in which: photo sensor portions are formed in a silicon layer over a substrate, a first conductivity type region being included in the photo sensor portions and a second conductivity type region being formed in the silicon layer implanted from a rear-surface of the solid-state imaging device by ion implantation; a wiring portion is formed above the silicon layer; and a supporting substrate is bonded to the wiring portion, wherein, the solid-state imaging device is configured for receiving incident light via the rear-surface of the solid-state imaging device.

First claim

Opening claim text (preview).

What is claimed is: 1. A method for manufacturing a solid-state imaging device comprising: forming photo sensor portions each having a first conductivity type and a depth in a thickness direction of a silicon layer that is greater than a width, the width being perpendicular to the depth, wherein the silicon layer has oppositely facing front and rear surfaces and the photo sensor portions are configured to receive incident light; forming second conductivity types adjacent to each…

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What does patent US8993369B2 cover?
A method for manufacturing a solid-state imaging device in which: photo sensor portions are formed in a silicon layer over a substrate, a first conductivity type region being included in the photo sensor portions and a second conductivity type region being formed in the silicon layer implanted from a rear-surface of the solid-state imaging device by ion implantation; a wiring portion is formed …
Who is the assignee on this patent?
Maruyama Yasushi, Abe Hideshi, Mori Hiroyuki, and 1 more
What technology area does this patent fall under?
Primary CPC classification H10F39/182. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).