Capacitor and method for manufacturing same
US-2024347278-A1 · Oct 17, 2024 · US
Methods of forming capacitors having dielectric regions that include multiple metal oxide-comprising materials
US8993044B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8993044-B2 |
| Application number | US-201213550340-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 16, 2012 |
| Priority date | Jun 12, 2009 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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Abstract
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Capacitors and methods of forming capacitors are disclosed, and which include an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode. A capacitor dielectric region is received between the inner and the outer conductive metal capacitor electrodes and has a thickness no greater than 150 Angstroms. Various combinations of materials of thicknesses and relationships relative one another are disclosed which enables and results in the dielectric region having a dielectric constant k of at least 35 yet leakage current no greater than 1×10 −7 amps/cm 2 at from −1.1V to +1.1V.
First claim
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The invention claimed is: 1. A method of forming a capacitor, comprising: depositing inner conductive metal capacitor electrode material over a substrate; forming a capacitor dielectric region outward of the inner conductive metal capacitor electrode material to a thickness no greater than 150 Angstroms, a dielectric constant k of at least 35, and leakage current no greater than 1×10 −7 amps/cm 2 at from −1.1V to +1.1V; the forming of the capacitor dielectric region comprising…
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Electricity · mapped topic
- H01G4/12Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US8993044B2 cover?
- Capacitors and methods of forming capacitors are disclosed, and which include an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode. A capacitor dielectric region is received between the inner and the outer conductive metal capacitor electrodes and has a thickness no greater than 150 Angstroms. Various combinations of materials of thicknesses and relati…
- Who is the assignee on this patent?
- Krishnan Rishikesh, Smythe John, Bhat Vishwanath, and 5 more
- What technology area does this patent fall under?
- Primary CPC classification H01G4/12. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).