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Method for removing halogen-containing residues from substrate
US8992689B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8992689-B2 |
| Application number | US-201213408703-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 29, 2012 |
| Priority date | Mar 1, 2011 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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Abstract
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Methods for removing halogen-containing residues from a substrate are provided. By combining the heat-up and plasma abatement steps, the manufacturing throughput can be improved. Further, by appropriately controlling the pressure in the abatement chamber, the removal efficiency can be improved as well.
First claim
Opening claim text (preview).
What is claimed is: 1. A method for removing halogen-containing residues from a substrate in a chamber, comprising: heating the substrate; exposing the substrate to reactive species generated by a plasma; raising a pressure in the chamber, in the presence of the plasma, after the plasma is generated; continuing to expose the substrate to reactive species, in the presence of the plasma, after raising the pressure; controlling the pressure in the chamber to below the pressur…
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Electricity · mapped topic
- H01J37/32357Primary
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US8992689B2 cover?
- Methods for removing halogen-containing residues from a substrate are provided. By combining the heat-up and plasma abatement steps, the manufacturing throughput can be improved. Further, by appropriately controlling the pressure in the abatement chamber, the removal efficiency can be improved as well.
- Who is the assignee on this patent?
- Diaz Adauto, Nguyen Andrew, Schwarz Benjamin, and 8 more
- What technology area does this patent fall under?
- Primary CPC classification H01J37/32357. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).