Method for purification of electronic gases and a purification device for the method
US-2024082780-A1 · Mar 14, 2024 · US
US8992669B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8992669-B2 |
| Application number | US-201113700549-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 31, 2011 |
| Priority date | May 31, 2010 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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The hydrogen separation membrane module according to the present invention is used for separating hydrogen from a gas to be treated containing hydrogen, and is provided with a tubular hydrogen separation membrane being selectively permeable to hydrogen, a casing for the hydrogen separation membrane, an insertion member being arranged on the inside of the hydrogen separation membrane and having an outer surface that defines a flow path of the gas to be treated together with an inner surface of the hydrogen separation membrane, a gas supply port for supplying the gas to be treated to the inside of the hydrogen separation membrane, a gas discharge port for discharging a non-permeating gas that does not permeate the hydrogen separation membrane, from a downstream side of the flow path, and a hydrogen discharge port provided in the casing, for discharging hydrogen having permeated the hydrogen separation membrane.
Opening claim text (preview).
The invention claimed is: 1. A hydrogen separation membrane module for separating hydrogen from a gas to be treated containing hydrogen, comprising: a tubular hydrogen separation membrane being selectively permeable to hydrogen, the hydrogen separation membrane comprising a supported membrane supported on a porous body; a casing for the hydrogen separation membrane; an insertion member arranged on an inside of the hydrogen separation membrane and having an outer surface that d…
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