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X-Y constraining unit, and stage apparatus and vacuum stage apparatus including the same

US8992086B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8992086-B2
Application numberUS-201314015073-A
CountryUS
Kind codeB2
Filing dateAug 30, 2013
Priority dateAug 31, 2012
Publication dateMar 31, 2015
Grant dateMar 31, 2015

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  1. Title

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  2. Abstract

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  5. First independent claim

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Abstract

Official abstract text for this publication.

Provided are X-Y constraining units having excellent yawing attitude precision as well as a stage apparatus and a vacuum stage apparatus, each including the X-Y constraining units. The X-Y constraining units 8 and 9 includes: Y-axis bases 81 and 91 respectively connected to Y-axis sliders 4 and 5 and having a through hole extending along Z direction; X-axis bases 82 and 92 respectively connected to an X-axis guide rail 6 ; shafts 83 and 93 respectively inserted into the through hole and fixed to the X-axis bases 82 and 92 ; and a plurality of bearing balls which are located between an inner peripheral surface of each of the through hole and an outer peripheral surface of the shafts 83 and 93 , and are arranged so as to circumferentially surround the shafts 83 and 93 . Each of the stage apparatus 1 and the vacuum stage apparatus includes the X-Y constraining units.

First claim

Opening claim text (preview).

What is claimed is: 1. An X-Y constraining unit, comprising: a Y-axis base connectable to a Y-axis slider configured to move along a Y-axis on a virtual X-Y plane; and an X-axis base connectable to an X-axis guide for guiding an X-axis slider configured to move along an X-axis on the virtual X-Y plane; wherein the Y-axis base is connectable to the Y-axis slider and the X-axis base is connectable to the X-axis guide via a connection plate so as to ensure that the Y-axis base an…

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Frequently asked questions

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What does patent US8992086B2 cover?
Provided are X-Y constraining units having excellent yawing attitude precision as well as a stage apparatus and a vacuum stage apparatus, each including the X-Y constraining units. The X-Y constraining units 8 and 9 includes: Y-axis bases 81 and 91 respectively connected to Y-axis sliders 4 and 5 and having a through hole extending along Z direction; X-axis bases 82 and 92 respe…
Who is the assignee on this patent?
Kyocera Corp, Advantest Corp
What technology area does this patent fall under?
Primary CPC classification F16C29/007. Mapped technology areas include Mechanical Engineering.
When was this patent published?
Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).