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Methods and apparatus for sealing a slit valve door
US8991785B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8991785-B2 |
| Application number | US-25645808-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 22, 2008 |
| Priority date | Oct 26, 2007 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
Apparatus, methods and systems are provided for sealing the door of a slit valve. In one embodiment, the apparatus includes a seal, adapted to extend along a perimeter of a slit valve door; and a hard stop, disposed between the seal and an outer edge of the slit valve door, and adapted to extend along the length of the seal, wherein the hard stop and elastomer seal fill at least a portion of a gap between the slit valve door and an insert leading to a process chamber.
First claim
Opening claim text (preview).
The invention claimed is: 1. A method for sealing a unitary slit valve door having a groove formed therein, comprising: providing a seal of flexible seal material disposed within the groove between a surface surrounding an opening to a process chamber and a surface of the slit valve door; disposing a hard stop alongside at least a portion of the seal between the seal and the groove and on an outside edge of the slit valve door, the hard stop formed integrally with the seal, wher…
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Classifications
Electricity · mapped topic
- H10P72/0441Primary
Electricity · mapped topic
Mechanical Engineering · mapped topic
- F16K3/06Primary
Mechanical Engineering · mapped topic
Mechanical Engineering · mapped topic
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- What does patent US8991785B2 cover?
- Apparatus, methods and systems are provided for sealing the door of a slit valve. In one embodiment, the apparatus includes a seal, adapted to extend along a perimeter of a slit valve door; and a hard stop, disposed between the seal and an outer edge of the slit valve door, and adapted to extend along the length of the seal, wherein the hard stop and elastomer seal fill at least a portion of a …
- Who is the assignee on this patent?
- Sico Angela Rose, Rice Michael R, Strassner James D, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0441. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).