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Pressure sensor, sensor probe comprising a pressure sensor, medical apparatus comprising a sensor probe and a method of fabricating a sensor probe
US8991265B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8991265-B2 |
| Application number | US-67443908-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 19, 2008 |
| Priority date | Aug 27, 2007 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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- Title
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Abstract
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A pressure sensor includes a flexible membrane deformable in response to pressure. The flexible membrane covers a cavity and includes a strain gauge that produces signals corresponding to deformation of the flexible membrane. The flexible membrane is a flexible monolithic integrated circuit foil.
First claim
Opening claim text (preview).
The invention claimed is: 1. A pressure sensor comprising: a substrate having a cavity; a flexible membrane deformable in response to a pressure, wherein the flexible membrane covers the cavity in the substrate; and a strain gauge that produces signals corresponding to deformation of the flexible membrane, wherein the flexible membrane is a flexible monolithic integrated circuit foil comprising the strain gauge, wherein the flexible monolithic integrated circuit foil furth…
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Electricity · mapped topic
- G01L19/148Primary
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
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Frequently asked questions
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- What does patent US8991265B2 cover?
- A pressure sensor includes a flexible membrane deformable in response to pressure. The flexible membrane covers a cavity and includes a strain gauge that produces signals corresponding to deformation of the flexible membrane. The flexible membrane is a flexible monolithic integrated circuit foil.
- Who is the assignee on this patent?
- Dekker Ronald, Van Der Graaf Frederik, Velthuis Johannes Fransiscus Maria, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification G01L19/148. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).