Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components
US-2015377624-A1 · Dec 31, 2015 · US
Displacement amount monitoring electrode arrangement
US8991252B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8991252-B2 |
| Application number | US-201113579089-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 26, 2011 |
| Priority date | Aug 26, 2011 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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Abstract
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According to a displacement amount monitoring electrode arrangement, there are a linear change region in which the change amount of capacitance changes linearly with the displacement of the movable electrode in the predetermined axis direction, and a nonlinear change region in which the change amount of the capacitance changes nonlinearly with the displacement of the movable electrode in the predetermined axis direction. The nonlinear change region includes a characteristic in which a change sensitivity of the change amount of the capacitance with respect to the displacement amount of the movable electrode in the predetermined axis direction is greater than that in the linear change region, and a target capacitance change amount of the capacitance when the displacement of the movable electrode in the predetermined axis direction reaches a target displacement amount corresponding to the target amplitude is set in the nonlinear change region.
First claim
Opening claim text (preview).
The invention claimed is: 1. A displacement amount monitoring electrode arrangement in which a fixed electrode fixed with respect to a substrate and a movable electrode configured to be movable in a predetermined axis direction parallel to the substrate, each of which has a comb shape formed by a base portion and plural electrode fingers extending from the base portion in the predetermined axis direction, are arranged such that the electrode fingers of the fixed electrode are engag…
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Classifications
- G01C19/5747Primary
Physics · mapped topic
- G01P15/125Primary
Physics · mapped topic
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Frequently asked questions
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- What does patent US8991252B2 cover?
- According to a displacement amount monitoring electrode arrangement, there are a linear change region in which the change amount of capacitance changes linearly with the displacement of the movable electrode in the predetermined axis direction, and a nonlinear change region in which the change amount of the capacitance changes nonlinearly with the displacement of the movable electrode in the pr…
- Who is the assignee on this patent?
- Narita Katsutoshi, Toyota Motor Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification G01C19/5747. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).