Systems and methods for mems gyroscope shock robustness
US-2015330783-A1 · Nov 19, 2015 · US
US8991248B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8991248-B2 |
| Application number | US-201113508521-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 27, 2011 |
| Priority date | Jan 29, 2010 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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An angular velocity sensor includes a support body, a retaining portion connected to the support body, first to fourth weights, first to fourth arms, a drive unit for driving the first to fourth arms, and a monitor unit for detecting displacements of the first to fourth arms. An X-axis, a Y-axis, and a Z-axis that are perpendicular to each other are defined. The detector unit is symmetrical with respect to both an axis parallel to the X-axis and an axis parallel to the Y-axis. This angular velocity sensor can cancel an undesired signal caused by external disturbances, such as acceleration or impact, thus detecting an angular velocity accurately.
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The invention claimed is: 1. An angular velocity sensor comprising: a support body, wherein an X-axis, a Y-axis, and a Z-axis that are perpendicular to each other are defined; a retaining portion connected to the support body; first to fourth weights; a first arm having one end supported by the retaining portion and another end connected to the first weight, the first arm extending in a positive direction of the Y-axis from the one end of the first arm; a second arm having…
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
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