System and method for laser-based auto-alignment
US-9221137-B2 · Dec 29, 2015 · US
Non-linearity determination of positioning scanner of measurement tool
US8990961B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8990961-B2 |
| Application number | US-201113217579-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 25, 2011 |
| Priority date | Jan 14, 2008 |
| Publication date | Mar 24, 2015 |
| Grant date | Mar 24, 2015 |
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Abstract
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Determination of non-linearity of a positioning scanner of a measurement tool is disclosed. In one embodiment, a method may include providing a probe of a measurement tool coupled to a positioning scanner; scanning a surface of a first sample with the surface at a first angle relative to the probe to attain a first profile; scanning the surface of the first sample with the surface at a second angle relative to the probe that is different than the first angle to attain a second profile; repeating the scannings to attain a plurality of first profiles and a plurality of second profiles; and determining a non-linearity of the positioning scanner using the different scanning angles to cancel out measurements corresponding to imperfections due to the surface of the sample. The non-linearity may be used to calibrate the positioning scanner.
First claim
Opening claim text (preview).
What is claimed is: 1. A system comprising: a measurement tool including a probe coupled to a positioning scanner; a fixture for holding a sample for scanning a surface of the sample with the surface at a first angle relative to the probe to attain a plurality of first profiles, wherein the first angle is substantially 90° relative to the probe, and scanning the surface of the sample with the surface at a second angle relative to the probe that is different than the first angle…
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Operations & Transport · mapped topic
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
- G01B21/042Primary
Physics · mapped topic
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- What does patent US8990961B2 cover?
- Determination of non-linearity of a positioning scanner of a measurement tool is disclosed. In one embodiment, a method may include providing a probe of a measurement tool coupled to a positioning scanner; scanning a surface of a first sample with the surface at a first angle relative to the probe to attain a first profile; scanning the surface of the first sample with the surface at a second a…
- Who is the assignee on this patent?
- Banke Jr George W, Robert James M, Strocchia-Rivera Carlos, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification G01B21/042. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Mar 24 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).