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Beam control apparatus for an illumination beam and metrology system comprising an optical system containing such a beam control apparatus
US8988752B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8988752-B2 |
| Application number | US-201213676473-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 14, 2012 |
| Priority date | Nov 14, 2011 |
| Publication date | Mar 24, 2015 |
| Grant date | Mar 24, 2015 |
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Abstract
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A beam control apparatus for an illumination beam includes an imaging illumination optical unit assembly for imaging an intermediate focus of the illumination beam onto an object field to be illuminated. A control component that influences a beam path of the illumination beam is displaceable in at least one degree of freedom by at least one displacement actuator. A position sensor device of the beam control apparatus detects a position of the intermediate focus. A control device of the beam control apparatus is signal-connected to the position sensor device and the displacement actuator. From an intermediate focus position signal received from the position sensor device, the control device calculates control signals for the displacement actuator and forwards the latter to the displacement actuator for controlling the position of the intermediate focus. This results in a beam control apparatus which makes well-controllable illumination possible together with a simple construction.
First claim
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What is claimed: 1. A beam control apparatus for an illumination beam comprising at least one control component which influences a beam path of the illumination beam in the illumination beam path upstream of an aerial image of an object illuminated by the illumination beam, said component being displaceable in a controlled manner in at least one degree of freedom by at least one displacement actuator, the at least one control component being located in the illumination beam path u…
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Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
- G02B26/0816Primary
Physics · mapped topic
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- What does patent US8988752B2 cover?
- A beam control apparatus for an illumination beam includes an imaging illumination optical unit assembly for imaging an intermediate focus of the illumination beam onto an object field to be illuminated. A control component that influences a beam path of the illumination beam is displaceable in at least one degree of freedom by at least one displacement actuator. A position sensor device of the…
- Who is the assignee on this patent?
- Zeiss Carl Smt Gmbh
- What technology area does this patent fall under?
- Primary CPC classification G02B26/0816. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Mar 24 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).