Imprinting device, method of fabricating the same, and method of patterning thin film using the same

US8986909B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8986909-B2
Application numberUS-3095908-A
CountryUS
Kind codeB2
Filing dateFeb 14, 2008
Priority dateJun 5, 2007
Publication dateMar 24, 2015
Grant dateMar 24, 2015

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  2. Abstract

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  5. First independent claim

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Abstract

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An imprinting device includes a first substrate, a light blocking layer formed on the first substrate corresponding to a light blocking area, and a patterned layer formed on the first substrate. The patterned layer includes an etch pattern and a flow control pattern formed on the first substrate corresponding to a transmittance area and the light blocking area, respectively. When the patterned layer presses a resin layer, the resin layer pressed by the etch pattern moves towards the flow control pattern or a photosensitive resin layer pressed by the flow control pattern moves towards the etch pattern according to a shape of the flow control pattern. Thus, when the shape of the flow control pattern is controlled, the resin layer pressed by the patterned layer may be formed with a uniform thickness.

First claim

Opening claim text (preview).

What is claimed is: 1. An imprinting device comprising: a first substrate including a transmittance area through which a light is transmitted and at least one light blocking area blocking the light; a light blocking layer having at least one alignment key formed by partially removing a portion therefrom and being formed on the first substrate corresponding to the at least one light blocking area, the light blocking layer disposed on the first substrate corresponding to between t…

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What does patent US8986909B2 cover?
An imprinting device includes a first substrate, a light blocking layer formed on the first substrate corresponding to a light blocking area, and a patterned layer formed on the first substrate. The patterned layer includes an etch pattern and a flow control pattern formed on the first substrate corresponding to a transmittance area and the light blocking area, respectively. When the patterned …
Who is the assignee on this patent?
Bae Jung-Mok, Samsung Display Co Ltd
What technology area does this patent fall under?
Primary CPC classification G03F7/0002. Mapped technology areas include Physics.
When was this patent published?
Publication date Tue Mar 24 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).