Holding device, method of determining attraction abnormality in holding device, lithography apparatus, and method of manufacturing article
US-2024393682-A1 · Nov 28, 2024 · US
US8986909B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8986909-B2 |
| Application number | US-3095908-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 14, 2008 |
| Priority date | Jun 5, 2007 |
| Publication date | Mar 24, 2015 |
| Grant date | Mar 24, 2015 |
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An imprinting device includes a first substrate, a light blocking layer formed on the first substrate corresponding to a light blocking area, and a patterned layer formed on the first substrate. The patterned layer includes an etch pattern and a flow control pattern formed on the first substrate corresponding to a transmittance area and the light blocking area, respectively. When the patterned layer presses a resin layer, the resin layer pressed by the etch pattern moves towards the flow control pattern or a photosensitive resin layer pressed by the flow control pattern moves towards the etch pattern according to a shape of the flow control pattern. Thus, when the shape of the flow control pattern is controlled, the resin layer pressed by the patterned layer may be formed with a uniform thickness.
Opening claim text (preview).
What is claimed is: 1. An imprinting device comprising: a first substrate including a transmittance area through which a light is transmitted and at least one light blocking area blocking the light; a light blocking layer having at least one alignment key formed by partially removing a portion therefrom and being formed on the first substrate corresponding to the at least one light blocking area, the light blocking layer disposed on the first substrate corresponding to between t…
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